A new type zero leaking sealing technology magnetic fluid sealing 一種新型零泄漏磁性流體密封技術
Magnetic field numerical calculation of rectangular poled magnetic fluid sealing device 矩形齒磁流體密封裝置的磁場計算
It also discusses the key technologies of robotic wafer handling system , including direct drive , magnetic fluid seals , magnetic coupling , trajectory planning , control technology , calibration and gripping 就直接驅動技術、磁性流體密封技術、磁力傳動技術、硅片機器人軌跡規(guī)劃與控制技術、校準技術以及夾持技術,對硅片機器人傳輸系統(tǒng)的關鍵技術進行了探討。
On the basis of magnetic fluid sealing principle and micro - nano characteristics , this paper studied and designed a kind of new micro - nano magnetic fluid sealing structure that could satisfy more nicely the sealing requirements of stirring shaft of high speed pressured reaction axe with large length to diameter ratio , and by means of experiment the optimization de sign was carried out on its relevant parameters 該文根據(jù)磁性流體密封原理和微納米特性,研究設計了一種能更好地滿足高速大長徑比壓力反應釜攪拌軸密封要求的新型微納米磁性流體密封結構,并通過實驗對其相關參數(shù)進行了優(yōu)化設計。